2017 March 15 - April 24
2017 May 17 - June 29
2017 BTR deadline: 04/17/17
2017 October 11 - December 21
2017 Proposal deadline: 08/01/17
2017 BTR deadline: 09/10/17
CHESS congratulates long-time user Professor Christopher K. Ober for winning two awards from the Society of Photopolymer Science and Technology – SPST: the Photopolymer Science and Technology Award (No.151100) and the Outstanding Achievement Award 2015 . The Society cites his outstanding achievements in photopolymer science and technology and the “Development of new advanced photoresist for microelectronics.” Ober is the Francis Bard Professor of Materials Engineering, Materials Science and Engineering, Cornell University and he and his students and post-doctoral associates have been long-time collaborators and codevelopers of techniques and technology for small-angle x-ray scattering capabilities with CHESS staff scientist Detlef Smilgies. In detail they cite his innovations in photoresists that are processed in non-polar “orthogonal” solvents, a number of firsts in the use of block copolymers in photoresists, using molecular glasses as possible replacements for polymer based photoresists, and, in recent work, showing that metal oxide nanoparticles 2 to 3 nm in size can act as superb EUV photoresists and have excellent resolution and extremely high sensitivity.
Great work all around!
Ernest Fontes, CHESS, Cornell University